Capacitance and impedance measurements


Instruments for measuring capacitance and impedance of various layers and interfaces depending on frequency and voltage: Precision LCR meter Agilent E4980A (20 Hz-2 MHz,  -40 V…+40 V), unique General Radio Precision Capacitance Bridge (sub attofarad resolution).

Mercury probe for capacitance measurement without permanent electrical contacts.

Two systems for capacitance and current Deep Level Transient Spectroscopy for studying defects and impurities in semiconductor structures.