Optical 3D sensors with high information efficiency

Abstract

Optical 3D sensors usually obtain a 3D surface shape from a series of 2D images (raw data). A sensor with high information yield needs as little raw data as possible to measure the shape. White light interferometry is an important measuring technique, it is able to measure almost all types of surfaces with high accuracy. Compared to triangulation, white light interferometry has a very low information yield. Depending on the depth of measurement, it needs hundreds of images. The aim of the project is to increase the information yield of interferometry in white light. The basic ideas are: strong subsampling of the coherence function, measurement against a reference object similar in shape to the measured object, and a combination of coherent interferometry in white light with incoherent focus analysis. Answers to the questions will be sought: How does the measurement uncertainty depend on the information yield? Is there an information yield limit that cannot be exceeded?