Patenty a licence

  1. M. Čada, Z. Hubička
    Device for generating high frequency plasma discharge with electron cyclotron wave resonance
  2. Z. Hubička, M. Čada, P. Kšírová, M. Klinger
    A method of generating low temperature plasma, a method of coating the inner surface of hollow electrically conductive or ferromagnetic tubes and the equipment for doing this
  3. Z. Hubička, M. Čada, P. Kšírová, Miloslav Klinger
    A device for pulsed plasma coating of internal surfaces of hollow dielectric tubes.
  4. P. Adámek, M. Čada, Z. Hubička, L. Jastrabík, Š. Kment, J. Olejníček
    Method of plasma diagnostics, excluding measurement disturbed by instability and transient phenomena in plasma, and device for performing this method.
  5. J. Olejníček, J. Šmíd, Z. Hubička, P. Adámek, M. Čada, Š. Kment
    A method of controlling the rate of deposition of thin layers in a vacuum multi-nozzle plasma system and a device for implementing this method
  6. Z. Hubička, M. Čada, Š. Kment, J. Olejníček, P. Adámek, V. Straňák
    A method for measuring low pressure deposition plasma using wave resonance of electrone-cyclotrone wave and device for realization of this method
  7. J. Olejníček, J. Šmíd, Z. Hubička, P. Adámek, M. Čada, Š. Kment
    Device to control deposition of thin layers in vacuum multijet plasma system
  8. P. Adámek, M. Čada, Z. Hubička, L. Jastrabík, Š. Kment, J. Olejníček
    Device for plasma diagnostics with exclusion of measurements disturbed by instabilities and transition effects in plasma
  9. Z. Hubička, M. Čada, Š. Kment, J. Olejníček, P. Adámek, V. Straňák
    High-frequency apparatus for measurement of plasma parameters with using of wave resonance of electron cyclotron wave
  10. Z. Hubička, V. Straňák, J. Šmíd, J. Olejníček, M. Čada, P. Adámek, Š. Kment, A. Kromka
    Hybrid plasma nozzle with surface wave for driving highly reactive discharges
  11. Z. Hubička, V. Straňák, J. Šmíd, J. Olejníček, M. Čada, P. Adámek, Š. Kment, A. Kromka
    Hybrid plasma nozzle with surface wave for exciting extremely reactive discharges
  12. P. Adámek, M. Čada, Z. Hubička, L. Jastrabík, J. Adámek, J. Stöckel
    A method for measuring the ion distribution function in a low temperature plasma, a measuring system for implementing the method and the probe for measuring system
  13. P. Adámek, M. Čada, Z. Hubička, Š. Kment, J. Olejníček
    Measuring system for microwave plasma diagnostics
  14. Z. Hubička, M. Čada, T. Kubart, P. Adámek, J. Olejníček, Š. Kment
    System for measurement of ion and neutral particles flux deposited onto substrate during thin film deposition process
  15. Z. Hubička, A. Dejneka, M. Čada, P. Adámek, L. Jastrabík, G. Suchaneck, J. Olejníček, Š. Kment, V. Straňák
    Plasma system developed for deposition of perovskite thin films
  16. P. Adámek, M. Čada, Z. Hubička, P. Virostko, L. Jastrabík, J. Olejníček, V. Straňák, R. Hippler, H. T. Do
    Diagnostics method for time-resolved laser absorption spectroscopy in pulsed plasmas and measuring system for the implementation of this diagnostics method.
  17. P. Adámek, M. Čada, Z. Hubička, L. Jastrabík, J. Adámek, J. Stöckel
    Diagnostics system for measurement of ion distribution function in low-temperature plasma and probe for diagnostics system
  18. P. Adámek, M. Čada, Z. Hubička, L. Jastrabík, Š. Kment, J. Olejníček
    The acquisition system for probe diagnostics of plasma by means of Langmuir probe
  19. M. Čada, Z. Hubička, L. Jastrabík, Š. Kment, J. Olejníček, P. Adámek
    The acquisition system for plasma diagnostics by means of Langmuir probe