Investigator
- D. Tvarog
- M. Pultar
- J. Šmíd
- A. Poruba
- J. Vaněk
- L. Pečiva
- P. Lukašík
- J. Dolák
Laboratory / Department
Date of award
Postscript
(2017) -.
Surfatron plasma source for substrates up to 100 mm
Postscript
(2017) -.