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  2. Preparation of materials

Preparation of materials

PECVD Apparatus Aurion for Deposition of Silicon Materials

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PECVD.jpg

Atomic Layer Deposition Apparatus ALD Picosun R-200 Advance

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ALD.jpg

PLD workstation for thin film deposition and laser ablation plume analysis

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PLD Station_for FZU report.jpg

System for molecular beam epitaxy, type Octoplus 350

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MBE Octoplus 350

Hybrid systems for thin film preparation

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Hybridní systémy pro přípravu tenkých vrstev

SPS - Spark Plasma Sintering Furnace

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Spark Plasma Sintering Furnace

Apparatus for preparation of semiconductor nitride structures AIXTRON 200-4 RF-S

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Dep14_Aixtron200-4RFS.jpg

System for magnetron sputtering, type AJA Orion 8

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Laboratoř magnetronového naprašování

Laboratory for organic synthesis and synthesis of nanoparticles

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25_Laboratoř_(vakuová sušárna, pumpa, lyofilizátor).jpg

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