Laser applications of Ho: YAG thin disk laser
Commencement date
11/1/2016
Completion date
10/31/2019
DELTA
Research and development of a new plasma activated ALD deposition system with a unique source of low-temperature plasma based on a microwave surfatron and ECWR discharge.
Commencement date
11/1/2016
Completion date
10/31/2019
Research and development of advanced PVD/PECVD low-temperature plasma system for deposition of functional thin and thick TiO2 films for industrial applications
Commencement date
3/1/2015
Completion date
2/28/2018