AXIS Supra


The AXIS Supra combines modern XPS performance with automation and ease of use.  This instrument can operate in both spectroscopy and imaging modes. 5-axis manipulator allows to cool and heat a sample in the temperature range from -100° to 8OO° C. The argon Minibeam 6 gas cluster ion source is optimized for depth profiling organic materials in Arncluster mode and inorganic materials in Ar+ monomer mode. This ion source can also generate He+ ions for ion scattering spectroscopy (ISS).