Scanning electron microscope FEI Quanta 3D FEG

Scanning electron microscope FEI QUANTA 3D equipped with energy dispersive detector (EDS) and detector of electron-backscatter diffraction (EBDS) allows for 2D/3D imaging and materials characterization at micro/nanoscale e.g. 2D/3D maps of crystallographic orientation, determination of chemical composition gradient, spatial distribution of particles, phases and inclusions from nanometers to hundreds of micrometers in size. Focused ion beam (FIB) enables fabrication of well-defined 3D object at microscale e.g. for nanomechanical testing using nanoindenter Hysitron PI 85 SEM PicoIndener, foil preparation for TEM, assembling MEMS, or modification of AFM tips.