Physical vapour deposition system

Vacuum system for electrical contact preparation
Regime
contract access
Category
Preparation of materials > Thin films and coatings
Inclusion to structure
Transport Phenomena Laboratory
Contact person
  • RNDr. Zuzana Gedeonová

Vacuum chamber Edwards AUTO 500 (p<10-6 mbar) for thin film deposition using electron beam evaporation and magnetron sputtering, including multilayer deposition from several sources. Main application: electrical contact preparation.