MOVPE apparatus AIXTRON CCS 3×2 FT for growth of nitride semiconductors

Modern technology for preparation of nitride semiconductor heterostructures by means of MOVPE (metal-organic vapour phase epitaxy) CCS 3×2 FT from the AIXTRON company. Stacking layers of compound A^IIIB^V semiconductors like GaN, AlN, InN and their ternary alloys, their doping and changes of growth parameters allow one to fabricate a variety of heterostructures with diverse applications. This system prepares quantum wells and superlattices for scintillators and transistors.