Thin-film tensometric sensors with high sensitivity and durability prepared by magnetron sputtering (Senzor)


The goal of the project is to research, develop, and apply all steps necessary to prepare a tensiometer sensor by magnetron sputtering on the surface of customer parts. The sensor exhibits high sensitivity, durability, and can work at elevated temperatures up to 1000 °C. The sensor can be applied in robotics, in precise machining, and in the long-term measurement of a part's lifetime.