Perex
Unique surface microstructures on silicon have been generated by doughnut-shaped ultrashort laser pulses. The creation of highly reproducible tubular and microneedle structures was achieved under single-shot fs-laser irradiation conditions.
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The underlying physical mechanisms of the interaction between a doughnut-shaped laser pulse and monocrystalline silicon leading to the formation of such structures have been proposed. The generated silicon microtubes and needles can find applications in various fields, such as intracellular delivery of micromolecules, micro/electromechanical systems, photovoltaic devices, and silicon-based photonics.
Description
Left: Experimental scheme. Right: Schematics of laser ablation with the formation of tubular and needle-like structures.