| Název | Režim přístupu | Kategorie | Kontaktní osoba |
|---|---|---|---|
| Intensified CCD camera | closed | Optical characterization | |
| NanoTest – Measurement of mechanical resistance of surfaces and layers | closed | Mechanical characterization | |
| Scatterometer – Measurement of surface roughness by laser beam scattering characteristics | closed | Optical characterization | |
| Streak Camera | closed | Optical characterization | |
| Tunable femtosecond laser system | closed | Optical characterization | |
| Vacuum UV spectrometer | closed | Optical characterization |
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