Název | Režim přístupu | Kategorie | Kontaktní osoba |
---|---|---|---|
Intensified CCD camera | closed | Optical characterization | |
NanoTest – Measurement of mechanical resistance of surfaces and layers | closed | Mechanical characterization | |
Scatterometer – Measurement of surface roughness by laser beam scattering characteristics | closed | Optical characterization | |
Streak Camera | closed | Optical characterization | |
Tunable femtosecond laser system | closed | Optical characterization | |
Vacuum UV spectrometer | closed | Optical characterization |