Mechanical structures with nanostructured composite coatings deposited by high power impulse magnetron sputtering

Authors

Q. Fu, G. Lorite, M. Rashid, R. Neuhaus, M. Čada, Z. Hubička, O. Pitkanen, T. Selkala, J. Uusitalo, C. Glanz, I. Kolaric, K. Kordas, C. Nicolescu, G. Toth

Laboratory / Department
Department of Low-Temperature Plasma
Citation
Carbon 98 (2016) 24–33
DOI
10.1016/j.carbon.2015.10.074
Year
2016

Reactive high power pulsed magnetron sputtering system (r-HIPIMS) was used for the deposition of nanocomposite layers CuCNx on milling tools. This coating damps vibration of this tool during a milling process. This coating is composed of composite layers CuCNx and metallic Cu interlayers. These interlayers improved adhesion and cohesion of this coating and further increased damping of mechanical vibration. These multilayers were deposited by the r-HIPIMS magnetron with copper target and reactive gasses C2H2 and N2.

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Reactive high power pulsed magnetron sputtering system.