Group of research of low-temperature plasma applied for the deposition of thin films

Name Provider and programme Investigator from FZU Year of commencement Year of completion
Innovative plasma-chemical and chemical synthesis of nickel-containing mixed oxide catalysts for the oxidation of volatile organic pollutants running GACR » Standard Mgr. Martin Čada, Ph.D. 2021 2023
Minimal Fab "Design" of the plasma enhanced atomic layer deposition system (Minimal Fab ALD) TACR » DELTA 2 Mgr. Martin Čada, Ph.D. 2020 2022
Advanced diagnostics of reactive HiPIMS plasma for deposition of oxide, nitride and sulphide layers GACR » Standard Mgr. Martin Čada, Ph.D. 2019 2021
Research and development of novel pulsed plasma technologies for deposition of advanced thin-film materials MIT » TRIO Mgr. Martin Čada, Ph.D. 2018 2021
Advanced preparation of catalytically active oxides on metal supports using plasma deposition and chemical methods GACR » Standard Mgr. Martin Čada, Ph.D. 2017 2019
Research and development of a new plasma activated ALD deposition system with a unique source of low-temperature plasma based on a microwave surfatron and ECWR discharge. TACR » DELTA Mgr. Martin Čada, Ph.D. 2016 2019
Study of pulsed plasma systems for thin film deposition for photonic applications GACR » Standard Mgr. Martin Čada, Ph.D. 2015 2017
Advanced preparation methods and experimental research of doped perovskite thin-film systems for high density energy storages GACR » Standard RNDr. Lubomír Jastrabík, CSc. 2012 2014
Výzkum hybridních HiPIMS systémů určených pro depozice nanostrukturovaných tenkých vrstev MEYS » Programmes of International Cooperation - COST CZ Mgr. Martin Čada, Ph.D. 2012 2013
Advanced experimental research of plasma discharge sources used for the preparation of nanostructured thin films GACR » Standard Mgr. Martin Čada, Ph.D. 2011 2013
Modern multilayer optical systems TACR » ALFA RNDr. Lubomír Jastrabík, CSc. 2011 2014
Research of low temperature plasma parameters in planar magnetron systems, hollow cathode systems and microwave surfatron systems. GACR » Postdoctoral Mgr. Martin Čada, Ph.D. 2009 2011