Department of Low-Temperature Plasma

Your selection corresponds to 5 items

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Název	Režim přístupu	Kategorie	Kontaktní osoba
Complex measuring system of low temperature plasma diagnostics applied in technological processes with the possibility of measurement with time resolution	closed	Plasma Diagnostics	Mgr. Martin Čada, Ph.D.
Hybrid reactive pulse HiPIMS + ECWR deposition system for deposition of semiconducting thin films	closed	Preparation of materials	Mgr. Zdeněk Hubička, Ph.D.
Linear plasma system with a series of hollow cathodes for rapid reactive thin film deposition	closed	Thin films and coatings	RNDr. Jiří Olejníček, Ph.D.
Plasma system for ALD deposition of ultrathin layers.	closed	Thin films and coatings	Mgr. Martin Čada, Ph.D.
RF probe for plasma diagnostics	closed	Plasma Diagnostics	Mgr. Zdeněk Hubička, Ph.D.

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