Measuring complex of piezoelectric thin films (with two-beam laser interferometer)

The aixDBLI: manual Double Beam Laser Interferometer is an electrical and optical system for measurements of electrical and electromechanical (piezoelectric) properties of materials, which are deposited on a wafer (thin films). Electrical contacts are realized using needle probes. Applied voltage up to 200 V; frequency range: 1 mHz to 5 kHz. Temperature-dependent measurements are performed using a HFS600E LINKAM stage in a range from -40 to 500°C.