Laboratory of Laser Deposition of and Study of Thin Films


Excimer lasers (193 / 248 nm): two Compex 205 F and one LUMONIX; Nd:YAG laser (1064 / 532 nm); Ten vacuum chambers for laser and hybrid depositions incl. RF discharge, magnetron (Kurt J. Lesker), ion bombardment (Kaufman-Robinson EH200 with max. power 210 eV) and heating stages; Profilometer Alphastep IQ (KIA Tencor), UV-VIS fiber spectrometers USB2000+ (Ocean optics) 200 900 nm include integrating; Thermocamera FLUKE Ti-55 (60 Hz); Heating oven (LAC LE 05/11)