Scanning electron microscope MAIA 3

P1030273.JPG
Regime
user access
Category
Characterisation and testing > Electron Microscopy
Inclusion to structure
Department of Thin Films and Nanostructures
Contact person
Manufacturer
http://www.tescan.com
Reservation system
https://dana.fzu.cz/dana.equipment/view-9

Scanning electron microscope MAIA 3 (Tescan) is equipped with detectors for the detection of secondary electrons (SE) and back-scattered electrons (BSE). Microscope demonstrates resolution of 1 nm at 15 kV. It is newly equipped with a detector for elemental analysis using EDS (Energy-dispersive X-ray spectroscopy).

A Thin film of plasma etched microcrystalline diamonds.
A Thin film of plasma etched microcrystalline diamonds.