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Scanning electron microscope MAIA 3 (Tescan) is equipped with detectors for the detection of secondary electrons (SE) and back-scattered electrons (BSE). Microscope demonstrates resolution of 1 nm at 15 kV. It is newly equipped with a detector for elemental analysis using EDS (Energy-dispersive X-ray spectroscopy).
Description
A Thin film of plasma etched microcrystalline diamonds.