Dr. Dominik Kriegner

Employee function
Head of Laboratory
Telephone
+420 220 318 621
E-mail
kriegner [at] fzu.cz
Locality
Cukrovarnická
Room
F 36
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The magnetron sputtering laboratory consists of a high vacuum system with four 2-inch magnetrons, a special purpose 1-inch sputter gun (cluster source) and a 4-inch substrate holder (temperature up to 970°C). Multiple DC and RF power supplies allow co-sputtering from multiple targets. While sample handling is manual, the deposition process can be fully automated.

High vacuum sputtering system AJA Orion 8
Description

High vacuum sputtering system AJA Orion 8