Dr. Dominik Kriegner
Employee function
Head of Laboratory
Telephone
+420 220 318 621, +420 220 318 623
E-mail
kriegner [at] fzu.cz
Locality
Cukrovarnická
Room
F 36
F 38
Text
The magnetron sputtering laboratory consists of a high vacuum system with four 2-inch magnetrons, a special purpose 1-inch sputter gun (cluster source) and a 4-inch substrate holder (temperature up to 970°C). Multiple DC and RF power supplies allow co-sputtering from multiple targets. While sample handling is manual, the deposition process can be fully automated.
Description
High vacuum sputtering system AJA Orion 8