Laboratory of magnetron sputtering

The magnetron sputtering laboratory consists of a high vacuum system with four 2-inch magnetrons, a special purpose 1-inch sputter gun (cluster source) and a 4-inch substrate holder (temperature up to 970°C). Multiple DC and RF power supplies allow co-sputtering from multiple targets. While sample handling is manual, the deposition process can be fully automated.

Description

High vacuum sputtering system AJA Orion 8