Abstract
The aims of the AMPS-ML project are the development of advanced MEMS technology for industrial applications in the sensor sector and fostering Czech-Taiwanese collaboration in advanced materials & sensor technologies. The project objectives explore innovative MEMS sensors revealing increased production yield, enhanced sensitivity/selectivity by implementing novel materials and machine learning (ML) resulting in improved gas identification accuracy as the following:
1. Syntheses of heterostructures w/o diamond for MEMS,
2. Application of hybrid detection principles for sensing gas, VOC & biomolecules,
3. Implementation of ML algorithms to enhance sensor performance,
4. Establishment of technological PVD/CVD processes for the fabrication of advanced MEMS elements.