The group's research activities are motivated by the growing demand for microsensors using advanced electronic materials. We focus on understanding the fundamental mechanisms of the interaction of gas molecules, photons and phonons at the interfaces of wide band gap materials (diamond, GaN, AlN) and their heterostructures formed with two-dimensional materials (MoS2, GO). We use complex analytical and spectroscopic techniques. The aim is to transfer theoretical and laboratory knowledge to real industrial applications. The fabrication of a functional MEMS sensor/actuator uses an iterative development strategy. We start with an initial idea followed by:

Modelling and simulation - creating a mathematical model, simulating mechanical and electrical behavior of MEMS elements using FEM (Ansys, Coventor).

Feature design - development of mask layout to implement the MEMS element using CAD tools.

Process technology - structuring MEMS elements using PVD, CVD and RIE techniques.

Functional evaluation - structural/mechanical/electrical/thermal analysis (by optical and Raman spectroscopy, AFM, SEM, impedance spectroscopy, IV & CV measurements).

Model validation – obtained experimental results are compared with the theoretical model and simulation results. The feedback is needed for understanding the behavior and further optimizing the desired parameters.