| AFM Bruker Dimension Icon, AFM Veeco Dimension IV |
user access |
Characterisation and testing |
|
| Apparatus for preparation of semiconductor nitride structures AIXTRON 200-4 RF-S |
user access |
Nanofabrication |
|
| Atomic force microscope NTEGRA Prima |
contract access |
Scanning probe microscopy |
|
| Capacitance and impedance measurements |
contract access |
Electrical characterisation |
|
| Focused Microwave Plasma Enhanced Chemical Vapour Deposition System |
closed |
Preparation of materials |
|
| Fourier-transform Infrared Spectrophotometer (FTIR) |
user access |
Characterisation and testing |
|
| Hall effect and resistivity system |
contract access |
Electrical characterisation |
|
| Laboratorní pec LAC typ LV15/13MT |
user access |
Materials processing |
|
| Laminar flow hood (Flowbox) |
user access |
Preparation of materials |
|
| Linear Antenna Microwave Plasma Enhanced Chemical Vapour Deposition System |
closed |
Preparation of materials |
|
| MOVPE apparatus AIXTRON CCS 3×2 FT for growth of nitride semiconductors |
user access |
Nanofabrication |
|
| Physical vapour deposition system |
contract access |
Thin films and coatings |
|
