| AFM Bruker Dimension Icon, AFM Veeco Dimension IV |
user access |
Characterisation and testing |
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| Apparatus for preparation of semiconductor nitride structures AIXTRON 200-4 RF-S |
user access |
Nanofabrication |
|
| Atomic force microscope NTEGRA Prima |
contract access |
Scanning probe microscopy |
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| Capacitance and impedance measurements |
contract access |
Electrical characterisation |
|
| Electron microscope Philips 30XL |
user access |
Electron Microscopy |
|
| Focused Microwave Plasma Enhanced Chemical Vapour Deposition System |
closed |
Preparation of materials |
|
| Fourier-transform Infrared Spectrophotometer (FTIR) |
user access |
Characterisation and testing |
|
| Hall effect and resistivity system |
contract access |
Electrical characterisation |
|
| Laboratorní pec LAC typ LV15/13MT |
user access |
Materials processing |
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| Laminar flow hood (Flowbox) |
user access |
Preparation of materials |
|
| Linear Antenna Microwave Plasma Enhanced Chemical Vapour Deposition System |
closed |
Preparation of materials |
|
| MOVPE apparatus AIXTRON CCS 3×2 FT for growth of nitride semiconductors |
user access |
Nanofabrication |
|
