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  5. Department of Semiconductors
  6. Equipment

Department of Semiconductors

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Your selection corresponds to 23 items
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AFM Bruker Dimension Icon, AFM Veeco Dimension IV

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Apparatus for preparation of semiconductor nitride structures AIXTRON 200-4 RF-S

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Atomic force microscope NTEGRA Prima

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Capacitance and impedance measurements

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GR capacitance bridge

Focused Microwave Plasma Enhanced Chemical Vapour Deposition System

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Fourier-transform Infrared Spectrophotometer (FTIR)

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Hall effect and resistivity system

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Transport measurement instruments

Laboratorní pec LAC typ LV15/13MT

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Laminar flow hood (Flowbox)

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Linear Antenna Microwave Plasma Enhanced Chemical Vapour Deposition System

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MOVPE apparatus AIXTRON CCS 3×2 FT for growth of nitride semiconductors

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Physical vapour deposition system

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Vacuum system for electrical contact preparation

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