Ultrathin boron-doped diamond – surface-wave-plasma synthesis of semi-conductive nanocrystalline boron-doped diamond layers at low temperature

This work reports on the synthesis of ultrathin boron-doped diamond layers prepared using a surface-wave-plasma (SWP) technique which enables a facile fabrication route for diamond coatings. As SWP synthesis allows for fabrication of BDD at much lower temperatures, when compared to conventional synthesis techniques, ultrathin BDD layers were prepared at 500 °C. A primary focus was given to the systematic optimization of CO2 concentration in the gas-phase to target BDD layers of moderate semi-conductive electrical characteristics, which are of interest for several applications (electrochemical and gas sensors).