Abstract
Research has driven by the need to increase accuracy of quantitative surface chemical analysis in electron spectroscopies. The state-of-the-art theoretical approaches based on semiclassical Monte Carlo methods and quantum mechanichal description of electron-matter interaction will be directly compared. Loss spectra from single crystals and polycrystalline materials will be measured. The coherent scattering contributions in electron loss spectra will be evaluated and reliability of both theoretical approaches will be estimated. Errors due to neglecting interference in electron scattering processes will be quantified. Contribution to the development of the widely used software for the electron energy loss spectra calculations is planned.