Rotary powder sample holder, vacuum assembly for a low pressure plasma reactor, their use and plasma powder modification method

Investigator
  • Y.Y. Chang
Laboratory / Department
Department of Optical Materials
Patent number
Patent 307913 / PV 2018-644
Date of award
Patent PV2018-644 registrován Úřadem průmyslového vlastnictví pod číslem CZ307913. Patent PV2018-644 registered by the Industrial Property Office under number CZ307913.