Application of the electrostatic Thompson-Lampard theorem to resistivity measurements


A method for measurement of resistivity of flat samples and thin layers complementary to the well-known van der Pauw technique has been proposed. The method is based on the application of the Thompson–Lampard theorem of electrostatics used in metrology for the realization of calculable capacitor, according to which a large variety of electrode systems convenient for quantitative transport measurements can be designed.

Lampard contacts
An example of the compact design of the Lampard electrode system convenient e.g. for the test pattern on semiconductor chips