Author P. Mareš, M. Dubau, J. Polášek, T. Mates, T. Kozák, J. Vyskočil Laboratory / Department Department of Thin Films and Nanostructures DOI 10.1016/j.vacuum.2021.110329 Postscript Vacuum 191 (2021) 110329(1)-110329(10). Date 2021
